MG600 Thermal Gas Mass Flow Meter
Summary:
The MG600 miniature gas mass flow meter is a high-precision measuring instrument built on an advanced MEMS sensor chip, specifically designed for the monitoring and control of small-flow clean gases. Featuring a unique packaging technology that eliminates the need for temperature and pressure compensation, it can be directly installed on pipes of various diameters, providing stable and reliable flow data for industrial processes. This product supports RS485 communication or 4–20 mA analog output and is equipped with an LCD display. It boasts fast response, excellent repeatability, and simple installation, making it widely used in semiconductor manufacturing, biomedicine, industrial gas production, laboratory analysis, and other fields—making it an ideal replacement for traditional mechanical flow meters.
Keywords:
Category:
The MG600 miniature gas mass flow meter is a high-precision measuring instrument built on an advanced MEMS sensor chip, specifically designed for the monitoring and control of small-flow clean gases. Featuring a unique packaging technology that eliminates the need for temperature and pressure compensation, it can be directly installed on pipes of various diameters, providing stable and reliable flow data for industrial processes. This product supports RS485 communication or 4–20 mA analog output and is equipped with an LCD display. It boasts fast response, excellent repeatability, and simple installation, making it widely used in semiconductor manufacturing, biomedicine, industrial gas production, laboratory analysis, and other fields—making it an ideal replacement for traditional mechanical flow meters.
Detailed introduction
Product Features
- A microelectromechanical systems (MEMS) flow-sensing chip is employed, endowing the sensor with high accuracy, high sensitivity, and strong anti-interference capabilities.
- Zero-point stability of the sensor.
- High accuracy and excellent repeatability within the measurement range.
- Standard mechanical interface for easy installation.
- RS485 communication output, standard MODBUS RTU protocol.
- It features an LCD display for both instantaneous and cumulative flow rates, providing clear, intuitive readings that are easy to interpret.
- Optional 4–20 mA standard current signal output and pulse output are available.
Technical Specifications
| Product Name | MG600 Thermal Gas Mass Flow Meter |
| Power Supply | DC24V/2.5W |
| Medium temperature | -10~55℃ |
| Work stress | ≤1MPa |
| Output method | 4–20 mA/RS485 optional |
| Mechanical connection | G3/4 external thread |
| Accuracy (%) | ±(2.0 + 0.2 FS) |
| Humidity | <95% RH (no frost, no ice) |
| Display | Instantaneous flow rate, cumulative flow |
| Communication Protocol | MODBUS RTU (RS485 output) |
| Response Time (ms) | 50-1000 |
Note: The above data were measured under conditions of 20°C, 101.32 kPa, and dry air.
Minimum measurable flow rate: 0.5 NL/min
Maximum measurable flow rate: 500 NL/min
Select Parameters
| Specifications | Default G3/8 external thread | Default G1/2 external thread | |||
| Flow range (L/min) | 0.5-50 | 1-100 | 2-200 | 3-300 | 5-500 |
| Flow range (m³/h) | 0.03-3 | 0.06-6 | 0.12-12 | 0.18-18 | 0.3-30 |
Product Dimensions
Industry Applications
| Industrial Gas Production | Scientific research experiment | Semiconductor | Medical Biology |
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