MGE6100 Thermal Gas Mass Flow Controller
Summary:
This product incorporates the latest-generation industrial-grade gas flow sensing chip, a high-end electromagnetic proportional valve, and a 316L stainless steel gas-path base, combined with a high-speed digital signal-processing circuit and a temperature-compensation algorithm, to enable rapid control of gas flow across a range from as low as 0.2 sccm to as high as 20 slm. It is suitable for applications such as gas-mixing instruments, analytical instruments, vacuum coating, and welding.
Keywords:
Category:
This product incorporates the latest-generation industrial-grade gas flow sensing chip, a high-end electromagnetic proportional valve, and a 316L stainless steel gas-path base, combined with a high-speed digital signal-processing circuit and a temperature-compensation algorithm, to enable rapid control of gas flow across a range from as low as 0.2 sccm to as high as 20 slm. It is suitable for applications such as gas-mixing instruments, analytical instruments, vacuum coating, and welding.
Detailed introduction
Product Features
- Excellent product stability
- Good repeatability and reproducibility
- High precision, small size
- Wide-temperature-range, high-precision operation
- Fast response time
- High cost-effectiveness
Technical Specifications
| Product Name | MGE6100 Thermal Gas Mass Flow Controller |
| Media Requirements | Clean, dry, non-corrosive gas |
| Medium Type | Air, nitrogen, oxygen, carbon dioxide, helium, hydrogen, methane, argon, and others |
| Measurement range (Nitrogen equivalent) | (0~20, 50, 100, 200, 500) sccm (0~1,2,5,10,20) slm |
| Accuracy | Take the greater of 0.8% F.S. or 1.0% S.P. |
| Range ratio | 100:1 |
| Response time | ≤1s |
| Repeatability | ≤±0.2%F.S. |
| Resolution | 0.01 sccm, ≤100 sccm 0.1 sccm, ≤1 slm and >100 sccm lsccm, ≤5 slm and >1 slm 0.01 slm, >5 slm |
| Leakage rate | ≤1×10⁹ Pa·m³/s·He |
| Maximum withstand voltage | 9.8bar |
| Operating temperature | 0~50℃ |
| Operating humidity | 10%–90% RH (no icing, no frost) |
| Work stress | 0.5~4 bar, >2 slm 0.5~6 bar, ≤2 slm (Specific range-related) |
| Storage temperature | -20~85℃ |
| Supply voltage | DC 24V, ripple ≤ 50 mV |
| Power Consumption | ≤2.7W |
| Startup Time | ≤1s |
| Interface Type | D-SUB9 |
| Analog Control | 0~5V |
| Digital Control | RS485 or RS232 |
| Interface Type | D-SUB9 |
| Communication rate | 9600 (default), 14400, 19200, 38400, 56000, 57600, 115200 (Can be modified via commands or the host computer) |
| Agreement | Modbus-RTU |
| Device Address | 1 (default) to 250 (can be modified via command or host computer) |
| Connector Type | Ferrules: 8 mm, 1/4 inch, 1/8 inch; other options available. |
| Gas-contact materials | 316L stainless steel, fluororubber, silicon dioxide |
| Main Material | Base: 316L stainless steel; Housing: aluminum alloy |
| Sealing material | FKM fluororubber |
| Weight | 0.90kg |
Note:
* Unless otherwise specified, this product is calibrated under the following conditions: nitrogen gas, 25°C, a differential pressure of 2.5 bar (inlet pressure 3.5 bar g, outlet pressure 1 bar g), and horizontal installation.
* It is recommended to install a straight pipe section of appropriate length at the inlet; otherwise, measurement accuracy may be compromised.
* It is recommended to match the largest possible fittings at both the inlet and outlet ends to avoid introducing additional pressure losses.
Industry Applications
| Industrial Gas Production | Analytical instruments | Fine Chemicals | Vacuum industry |
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