MG620FC Thermal Gas Mass Flow Controller
Summary:
Micro gas mass flow controllers are specifically designed for the measurement and control of small gas flow rates. The sensors in this series are all fabricated using advanced microelectromechanical systems (MEMS) flow-sensing chips, combined with digital signal-processing techniques and flow-control algorithms, to achieve precise control and intelligent processing of various gas flow rates.
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Micro gas mass flow controllers are specifically designed for the measurement and control of small gas flow rates. The sensors in this series are all fabricated using advanced microelectromechanical systems (MEMS) flow-sensing chips, combined with digital signal-processing techniques and flow-control algorithms, to achieve precise control and intelligent processing of various gas flow rates.
Detailed introduction
Product Features
Adopting microelectromechanical systems Designed with a MEMS flow-sensing chip, a bypass shunt, and a solenoid proportional valve, the sensor features high accuracy and strong anti-interference performance. Its strong feature is that the bypass fluid in the diverter flows in a laminar regime, thereby ensuring more stable and precise measurement and control. The electromagnetic proportional valve boasts a long service life and high sensitivity. degree Advanced characteristics.
- Sensor zero-point stability.
- High measurement range accuracy and excellent repeatability.
- Fast response time.
- Standard mechanical interface for easy installation.
- RS485 communication output, standard MODBUS RTU protocol.
- Employs an LCD display to show both instantaneous and cumulative flow rates, providing clear, intuitive readings that are easy to interpret. Flow rate can be controlled via keypad input, with the setpoint and real-time flow values displayed directly on the LCD screen.
- Standard 4–20 mA output; customizable 1–5 V or 0–10 V input/output control
Technical Specifications
| Product Name | MG620 Thermal Gas Mass Flow Controller |
| Power Supply | DC24V/12W |
| Accuracy (%) | Control accuracy: ±1.0% of setpoint; measurement accuracy: 1% of full scale |
| Control and measurement range ratio | 1:100 |
| Valve Type | Normally Closed |
| Operating temperature | -10~55℃ |
| Humidity | <95% RH (no frosting, no icing, no condensation) |
| Traffic Specification | (0~10, 20, 30, 50, 100, 200, 300, 500) SCCM (0~1, 2, 3, 5, 10, 20, 30) SLM (0~50, 100) SLM (0–200, 300) SLM |
| Work stress range | Measurement: 0–1.5 MPa Control: 10 SCCM–30 SLPM; Pressure: 0.1–1.0 MPa 100SPLM pressure: 0.1–0.65 MPa 300SPLM pressure: 0.1–0.5 MPa |
| Typical control response time | Less than 1.5 seconds (T90) |
| Measure response time | <50mS |
| Output method | 4–20 mA (1–5 V); customizable to 0–5 V or 0–10 V |
| Communication Methods | RS485 (Modbus RTU protocol) |
| Control Method | Button operation, Modbus, 4–20 mA (1–5 V); customizable 0–5 V or 0–10 V. |
| Mechanical connection | G1/4, PT1/2 internal threads; other thread types available for customization. |
| Protection Level | IP40 |
Note: The above data were measured under conditions of 25°C, 101.32 kPa, and dry air.
| Standard temperature conditions are optional. | 0°, 20°, 25°; user-adjustable; default is 25°. |
| Gas type selectable | Air, N2, O2, CH4, Ar, CO2, He, H2, C3H8 |
| Normal operating pressure differential | 0.1–0.8 MPa, flow rate specification ≤ 30 SLM 0.1 MPa–0.6 MPa, 30 SLM < flow rate specification ≤ 100 SLM 0.1 MPa–0.4 MPa, 100 SLM < flow rate specification < 300 SLM |
| Non-standard working pressure differential | Customizable Consultation |
Industry Applications
| Industrial Gas Production | Scientific research experiment | Semiconductor | Medical Biology |
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