MGJX680FC Thermal Gas Mass Flow Controller
Summary:
The MGJX680FC mass flow controller (MFC) is designed for precise measurement and control of gas mass flow. It plays a critical role in research and production across a wide range of fields, including the semiconductor and integrated circuit industries, specialty materials science, the chemical industry, the petroleum industry, pharmaceuticals, environmental protection, and vacuum technology. Typical applications include electronic process equipment such as diffusion, epitaxy, CVD, oxidation, plasma etching, sputtering, and ion implantation; as well as coating equipment, optical fiber drawing, microreactors, gas mixing and distribution systems, capillary flow measurement, gas chromatographs, and other analytical instruments. The MGJX680FC measures gas mass flow using the differential-temperature calorimetric method based on heat transfer through a capillary tube, ensuring that the measurement is unaffected by temperature and pressure variations. The flow signal detected by the sensor is amplified and then compared with a setpoint voltage; the resulting error signal is used to drive the control valve, thereby maintaining closed-loop regulation of the flow rate through the channel so that it matches the desired setpoint.
Keywords:
The MGJX680FC mass flow controller (MFC) is designed for precise measurement and control of gas mass flow. It plays a critical role in research and production across a wide range of fields, including the semiconductor and integrated circuit industries, specialty materials science, the chemical industry, the petroleum industry, pharmaceuticals, environmental protection, and vacuum technology. Typical applications include electronic process equipment such as diffusion, epitaxy, CVD, oxidation, plasma etching, sputtering, and ion implantation; as well as coating equipment, optical fiber drawing, microreactors, gas mixing and distribution systems, capillary flow measurement, gas chromatographs, and other analytical instruments. The MGJX680FC measures gas mass flow using the differential-temperature calorimetric method based on heat transfer through a capillary tube, ensuring that the measurement is unaffected by temperature and pressure variations. The flow signal detected by the sensor is amplified and then compared with a setpoint voltage; the resulting error signal is used to drive the control valve, thereby maintaining closed-loop regulation of the flow rate through the channel so that it matches the desired setpoint.
Detailed introduction
Product Features
- Thermal principle, fast response, high accuracy
- Tubular diversion, resistant to clogging
- Suitable for various low- and high-pressure pipelines
- Short warm-up time, minimal zero drift, and high reliability
- Analog input/output, enabling flow control and display via secondary instruments or flow computers.
Technical Specifications
| Product Name | MGJX680FC Thermal Gas Mass Flow Meter |
| Measurement range | (0~5, 10, 20, 30, 50, 100, 200, 300, 500...) SCCM (0~1, 2, 3, 5, 10, 50…200…3000) SLM |
| Accuracy | ±1.0% F.S |
| Linear | ±0.5~1.5%F.S |
| Repeatability | ±0.2% F.S |
| Operating pressure differential | 0.1–0.5 MPa (to be specified at the time of order) |
| Withstand voltage | 3 MPa (specified at the time of order) |
| Operating ambient temperature | Room temperature |
| Digital quantity | RS485 / RS232 MODBUS Protocol |
| Analog quantity | 0–5 V, 1–5 V, and 4–20 mA options available. |
| Power supply | DC ±15 V / 24 V optional; flow meter < 400 mA, controller < 600 mA. |
| Electrical Connection | DB15 |
| Leak rate | 1×10⁻⁹ Pa·m³/s |
| Base material | Stainless steel |
| Sealing material | Fluororubber, nitrile rubber, perfluoroether, etc. |
| Air line connector | Compression fittings, tower fittings, quick-connect couplings, flanges, etc. |
Industry Applications
| Glass industry | Process Manufacturing | Petroleum and Petrochemical | Instrumental Analysis |
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