MG620 Thermal Gas Mass Flow Meter
Summary:
The MG620 is a high-precision, miniature gas mass flow meter based on MEMS sensing technology, specifically designed for the precise measurement and control of low-flow clean gases. Featuring a microelectromechanical systems chip, this product delivers outstanding zero-point stability and repeatability, eliminating the need for temperature and pressure compensation and enabling direct output of gas mass flow. With a wide turndown ratio of 1:100, it supports multiple output options, including 4–20 mA, 1–5 V, 0–10 V, and 0–5 V, and can communicate data via RS485 using the Modbus RTU protocol. It is ideally suited for applications in aerospace, semiconductor manufacturing, biomedicine, industrial gas production, and other fields, making it the optimal choice for high-accuracy, high-reliability gas flow monitoring.
Keywords:
Category:
The MG620 is a high-precision, miniature gas mass flow meter based on MEMS sensing technology, specifically designed for the precise measurement and control of low-flow clean gases. Featuring a microelectromechanical systems chip, this product delivers outstanding zero-point stability and repeatability, eliminating the need for temperature and pressure compensation and enabling direct output of gas mass flow. With a wide turndown ratio of 1:100, it supports multiple output options, including 4–20 mA, 1–5 V, 0–10 V, and 0–5 V, and can communicate data via RS485 using the Modbus RTU protocol. It is ideally suited for applications in aerospace, semiconductor manufacturing, biomedicine, industrial gas production, and other fields, making it the optimal choice for high-accuracy, high-reliability gas flow monitoring.
Detailed introduction
Product Features
- Standard mechanical interface for easy installation.
- Employs a microelectromechanical systems (MEMS) flow-sensing chip, which features high accuracy, high sensitivity, and strong anti-interference capability.
- Rangeability of 1:100, accommodating various flow ranges; high accuracy and excellent repeatability across the entire range.
- Short response time, making it suitable for dynamic flow measurement.
- Measurable gases include air, nitrogen, oxygen, argon, methane, propane, carbon dioxide, hydrogen, helium, and others.
Technical Specifications
| Product Name | MG620 Thermal Gas Mass Flow Meter |
| Power Supply | DC24V/2.5W |
| Medium temperature | -10~55℃ |
| Work stress | ≤1.1 MPa (1.6 MPa optional) |
| Output method | 4-20mA |
| Mechanical connection | G1/2 and G1/4 internal threads |
| Accuracy (%) | ±(1.5+0.2FS) |
| Humidity | <95% RH (no frost, no ice) |
| Display | Instantaneous flow rate, cumulative flow |
| Communication Method | RS485 (Modbus RTU protocol) |
| Response Time (ms) | 50-1000 |
Remarks :The above data were measured under conditions of 20°C, 101.32 kPa, and dry air.
Select Parameters
| Specifications | Flow range L/min | Flow range m³/h |
| Default internal threads: G1/2 and G1/4 | 0.001-0.1 | 0.00006–0.006 |
| 0.005-0.5 | 0.0003–0.03 | |
| 0.01-1 | 0.0006–0.06 | |
| 0.1-10 | 0.006-0.6 | |
| 0.3-30 | 0.018-1.8 | |
| 0.5-50 | 0.03-3 | |
| 1-100 | 0.06-6 | |
| 2-200 | 0.12-12 | |
| 3-300 | 0.18-18 |
Remarks :Body material F0-anodized aluminum, F1-304 stainless steel, F2-316 stainless steel
Product Dimensions
Industry Applications
| Industrial Gas Production | Scientific research experiment | Semiconductor | Medical Biology |
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