MG610 Thermal Gas Mass Flow Meter
Summary:
The MG610 is a high-precision, miniature gas mass flow meter based on a MEMS sensing chip, specifically designed for the measurement and control of low-flow clean gases. Leveraging advanced packaging technology, it requires no temperature or pressure compensation and delivers outstanding measurement stability and repeatability, making it a viable replacement for conventional positive-displacement or differential-pressure flow meters. The device supports 4–20 mA current output and RS485 communication, features an LCD display for real-time flow data visualization, and offers multi-gas type selection, alarm outputs, and flexible parameter configuration. It is ideally suited for precision gas flow monitoring and control in industries such as semiconductors, biomedicine, industrial gas production, and automotive electronics.
Keywords:
Category:
The MG610 is a high-precision, miniature gas mass flow meter based on a MEMS sensing chip, specifically designed for the measurement and control of low-flow clean gases. Leveraging advanced packaging technology, it requires no temperature or pressure compensation and delivers outstanding measurement stability and repeatability, making it a viable replacement for conventional positive-displacement or differential-pressure flow meters. The device supports 4–20 mA current output and RS485 communication, features an LCD display for real-time flow data visualization, and offers multi-gas type selection, alarm outputs, and flexible parameter configuration. It is ideally suited for precision gas flow monitoring and control in industries such as semiconductors, biomedicine, industrial gas production, and automotive electronics.
Detailed introduction
Product Features
- ·Standard mechanical interface for easy installation; the screen display orientation can be adjusted to suit specific reading requirements.
- Employs a microelectromechanical systems (MEMS) flow-sensing chip, which features high accuracy, high sensitivity, and strong anti-interference capability.
- Rangeability of 1:100, accommodating various flow ranges; high accuracy and excellent repeatability across the entire range.
- Short response time, making it suitable for dynamic flow measurement.
- Measurable gases include air, nitrogen, oxygen, argon, methane, propane, carbon dioxide, hydrogen, helium, and others.
Technical Specifications
| Product Name | MG610 Thermal Gas Mass Flow Meter |
| Power Supply | DC24V/2.5W |
| Medium temperature | -10~55°C |
| Work stress | ≤1.0 MPa |
| Output method | 4-20mA |
| Mechanical connection | BSPT 1/4 internal thread (DN10) |
| BSPT 3/8 internal thread (DN10) | |
| BSPT 1/2-inch internal thread (DN15) | |
| BSPT 3/4-inch internal thread (DN20) | |
| BSPT 1 internal thread (DN25) | |
| All options feature a G internal thread interface. | |
| Accuracy (%) | ±(1.5+0.2FS) |
| Humidity | < 95% RH (no frosting, no icing) |
| Display | Instantaneous flow, cumulative flow |
| Communication Method | RS485 (Modbus RTU protocol) |
| Response Time (ms) | 50-1000 |
Note: The above data are based on Measured under dry air conditions at 20°C and 101.32 kPa.
Select Parameters
| Specifications | Default G3/8 internal thread | Default G1/2 internal thread | Default G3/4 internal thread | Default G1 internal thread | ||||
| Flow range | L/min | 0.5-50 | 1-100 | 2-200 | 3-300 | 5-500 | 10-1000 | 20-2000 |
| Flow range | cubic meters per hour | 0.03-3 | 0.06-6 | 0.12-12 | 0.18-18 | 0.3-30 | 0.6-60 | 1.2-120 |
Note: Maximum measurable flow rate: 2000 NL/min; high-flow options available upon customization.
Product Dimensions
Product Dimensions
Industry Applications
| Industrial Gas Production | Scientific research experiment | Semiconductor | Medical Biology |
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