MGJX680 Thermal Gas Mass Flow Meter
Summary:
The MGJX680 mass flow meter (abbreviated as MFM) is used for precise measurement of gas mass flow. It plays a critical role in research and production across a wide range of fields, including the semiconductor and integrated circuit industries, specialty materials science, the chemical industry, the petroleum industry, pharmaceuticals, environmental protection, and vacuum technology. Typical applications include electronic process equipment such as diffusion, epitaxy, CVD, oxidation, plasma etching, sputtering, and ion implantation; as well as coating equipment, optical fiber melting, microreactor systems, gas mixing and distribution systems, capillary flow measurement, gas chromatographs, and other analytical instruments. The MGJX680 measures gas mass flow using the principle of calorimetric measurement based on the temperature difference before and after heat transfer through a capillary tube, ensuring that the measurement is unaffected by changes in temperature and pressure. The flow signal detected by the sensor is amplified and then compared with a set voltage; the resulting error signal is used to drive a control valve, thereby implementing closed-loop control to adjust the flow rate through the channel until it matches the desired setpoint.
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Category:
The MGJX680 mass flow meter (abbreviated as MFM) is used for precise measurement of gas mass flow. It plays a critical role in research and production across a wide range of fields, including the semiconductor and integrated circuit industries, specialty materials science, the chemical industry, the petroleum industry, pharmaceuticals, environmental protection, and vacuum technology. Typical applications include electronic process equipment such as diffusion, epitaxy, CVD, oxidation, plasma etching, sputtering, and ion implantation; as well as coating equipment, optical fiber melting, microreactor systems, gas mixing and distribution systems, capillary flow measurement, gas chromatographs, and other analytical instruments. The MGJX680 measures gas mass flow using the principle of calorimetric measurement based on the temperature difference before and after heat transfer through a capillary tube, ensuring that the measurement is unaffected by changes in temperature and pressure. The flow signal detected by the sensor is amplified and then compared with a set voltage; the resulting error signal is used to drive a control valve, thereby implementing closed-loop control to adjust the flow rate through the channel until it matches the desired setpoint.
Detailed introduction
Product Features
- Thermal principle, fast response, high accuracy
- Tubular diversion, resistant to clogging
- Suitable for various low- and high-pressure pipelines
- Short warm-up time, minimal zero drift, and high reliability
- Analog input/output, enabling flow control and display via secondary instruments or flow computers.
Technical Specifications
| Product Name | MGJX680 Thermal Gas Mass Flow Meter |
| Measurement range | (0~5, 10, 20, 30, 50, 100, 200, 300, 500...) SCCM (0~1, 2, 3, 5, 10, 50…200…3000) SLM |
| Accuracy | ±1.0% F.S |
| Linear | ±0.5~1.5%F.S |
| Repeatability | ±0.2% F.S |
| Operating pressure differential | 0.1–0.5 MPa (to be specified at the time of order) |
| Withstand voltage | 3 MPa (specified at the time of order) |
| Operating ambient temperature | Room temperature |
| Digital quantity | RS485 / RS232 MODBUS Protocol |
| Analog quantity | 0–5 V, 1–5 V, and 4–20 mA options available. |
| Power supply | DC ±15 V / 24 V optional; flow meter < 400 mA, controller < 600 mA. |
| Electrical Connection | DB15 |
| Leak rate | 1×10⁻⁹ Pa·m³/s |
| Base material | Stainless steel |
| Sealing material | Fluororubber, nitrile rubber, perfluoroether, etc. |
| Air line connector | Compression fittings, tower fittings, quick-connect couplings, flanges, etc. |
Industry Applications
| Glass industry | Process Manufacturing | Petrochemical | Instrumental Analysis |
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