MGX690 Thermal Gas Mass Flow Meter
Summary:
MGX690 Series Digital Mass Flow Controllers/Flow Meters: Featuring a self-developed, industrial-grade advanced flow sensor, coupled with a meticulously polished gas-path design and high-precision digital control circuitry and algorithms, these devices deliver high accuracy, low zero drift, and excellent repeatability. The product is equipped with an on-site display and address-code switches, offers multiple communication options, and can be customized with all-metal sealing, making it ideally suited for semiconductor, vacuum coating, photovoltaic, and other diverse application environments.
Keywords:
Category:
MGX690 Series Digital Mass Flow Controllers/Flow Meters: Featuring a self-developed, industrial-grade advanced flow sensor, coupled with a meticulously polished gas-path design and high-precision digital control circuitry and algorithms, these devices deliver high accuracy, low zero drift, and excellent repeatability. The product is equipped with an on-site display and address-code switches, offers multiple communication options, and can be customized with all-metal sealing, making it ideally suited for semiconductor, vacuum coating, photovoltaic, and other diverse application environments.
Detailed introduction
Product Features
- Rich physical function modules: zero-point calibration button, alarm indicator light, EtherCAT error indicator light, EtherCAT or RS485 interface (input/output), digital display, and three address coding switches.
- Rapid response: sensor response time of 1.5 ms; instrument system response time of 0.1–0.5 s, enabling timely detection of even minor flow variations.
- High accuracy: Maintains high accuracy across the entire measurement range from 1.0% to 100% of full scale: 0.3% of full scale (≤30% of full scale); 1.0% of span (>30% of full scale).
- Enhanced protocol options / Dedicated host computer configuration: The product is equipped with address-encoding switches and a dedicated power supply interface, and can be customized to support EtherCAT or RS485 digital communication.
- Equipped with a dedicated host computer: Features the powerful SmartFlow software, which supports multi-unit interoperation and facilitates monitoring and device configuration for users.
- Certified products: Certified by TÜV International, CE & EMC, and the National Institute of Metrology, among others, and compliant with multiple SEMI standards.
Technical Specifications
| Product Name | MGX690 Gas Mass Flow Meter |
| Media Requirements | Clean, dry, non-corrosive gas |
| Medium Type | Air, nitrogen, oxygen, carbon dioxide, helium, hydrogen, methane, ammonia, and others |
| Measurement range (nitrogen equivalent) | (0~20, 50, 100, 200, 500) sccm (0~1, 2, 5, 10, 20, 50) slm Other ranges are available upon request; please consult for details. |
| Accuracy | ±0.3% F.S. (≤30% F.S.) ±1.0% of span (＞30% of full scale) |
| Range ratio | 50:1 |
| Response time | ≤10ms |
| Repeatability | ≤±0.2%F.S. |
| Resolution | 0.01 sccm, ≤100 sccm 1 sccm, >100 sccm |
| Leak rate | Fluororubber seal: ≤4×10⁻¹⁰ Pa·m³/s He All-metal sealing: ≤1×10⁻¹² Pa·m³/s He |
| Maximum withstand voltage | 10bar |
| Operating temperature | 0~50℃ |
| Operating humidity | 10%–90% RH (no icing, no frost) |
| Work stress | 100bar |
| Storage temperature | -20~85℃ |
| Supply voltage | DC24V |
| Power consumption | ≤2.7W |
| Startup Time | ≤1s |
| Joint Type | Ferrule: 1/4 inch VCR: 1/4 inch Other options |
| Gas-contact materials | Fluororubber seal: 316L stainless steel, fluororubber, silicon dioxide All-metal sealing: 316L stainless steel |
| Main Material | Base: 316L stainless steel Housing: Aluminum alloy |
| Sealing material | FKM fluororubber or all-metal |
| Weight | Flow meter: 0.80 kg |
| EtherCAT communication | |
| Interface Type | RJ45 |
| Device Address | 1 (default) - 99 Can be modified via the top DIP switch. |
| RS485 communication | |
| Interface Type | M8 aviation connector |
| Communication rate | 9600, 19200, 115200 (default) Can be modified via the host computer and commands. |
| Agreement | Modbus-RTU |
| Device Address | 1 (default) ~250 Can be modified via the host computer and commands. |
Unless otherwise specified, this product is calibrated under the following conditions: nitrogen gas, 25°C, a differential pressure of 2.5 bar (inlet pressure of 3.5 bar g, outlet pressure of 1 bar g), and horizontal installation.
It is recommended to install a straight pipe section of appropriate length at the inlet; otherwise, measurement accuracy may be compromised.
It is recommended to use the largest possible fittings at both the inlet and outlet ends to minimize additional pressure loss.
1. The range shown is the optional range for nitrogen.
2. %F.S. refers to the percentage of the error relative to full scale.
3. %S.P. refers to the percentage of error relative to the setpoint.
4. Response time refers to the time required to reach within ±2% of the setpoint.
5. Working pressure refers to the differential pressure between the inlet and outlet.
Industry Applications
| Industrial Gas Production | Scientific Research Experiment | Semiconductor | Photovoltaic industry |
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